Stabilization of a cold cathode electron beam glow discharge for surface treatment
نویسندگان
چکیده
We have demonstrated that the reproducibility of electron beam pulses generated by a high power, cold cathode glow discharge is greatly improved by adding a small continuous keep-alive discharge current. A current of the order of 200 mA was found to limit the shot to shot current variation to within 1.5%. This stabilization in turn reduces by an order of magnitude the fluctuations of the energy density deposited on the target, demonstrating a reliable energy source for surface treatment. © 1997 American Institute of Physics. @S0021-8979~97!05217-1#
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